Invention Application
US20130120863A1 SUBSTRATES FOR MIRRORS FOR EUV LITHOGRAPHY AND THEIR PRODUCTION
有权
用于EUV光刻及其生产的镜子的基底
- Patent Title: SUBSTRATES FOR MIRRORS FOR EUV LITHOGRAPHY AND THEIR PRODUCTION
- Patent Title (中): 用于EUV光刻及其生产的镜子的基底
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Application No.: US13667862Application Date: 2012-11-02
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Publication No.: US20130120863A1Publication Date: 2013-05-16
- Inventor: Julian KALLER , Wilfried CLAUSS , Michael GERHARD
- Applicant: CARL ZEISS SMT GMBH
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: DE Oberkochen
- Priority: DE102010028488.2 20100503
- Main IPC: G02B5/08
- IPC: G02B5/08 ; C03C14/00

Abstract:
For the production of mirrors for EUV lithography, substrates are suggested having a mean relative thermal longitudinal expansion of no more than 10 ppb across a temperature difference ΔT of 15° C. and a zero-crossing temperature in the range between 20° C. and 40° C. For this purpose, at least one first and one second material having low thermal expansion coefficients and opposite gradients of the relative thermal expansion as a function of temperature are selected and a substrate is produced by mixing and bonding these materials.
Public/Granted literature
- US08870396B2 Substrates for mirrors for EUV lithography and their production Public/Granted day:2014-10-28
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