发明申请
- 专利标题： TARGET FOR SPARK VAPORIZATION WITH PHYSICAL LIMITING OF THE PROPAGATION OF THE SPARK
- 专利标题（中）： 用于火山喷发的目标用于火山喷发的物理限制
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申请号： US13641499申请日： 2011-01-10
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公开(公告)号： US20130126348A1公开(公告)日： 2013-05-23
- 发明人: Siegfried Krassnitzer , Juerg Hagmann
- 申请人： Siegfried Krassnitzer , Juerg Hagmann
- 申请人地址： CH Trubbach
- 专利权人： OERLIKON TRADING AG, TRUBBACH
- 当前专利权人： OERLIKON TRADING AG, TRUBBACH
- 当前专利权人地址： CH Trubbach
- 优先权： US61324929 20100416; DE102010020737.3 20100517
- 国际申请： PCT/EP2011/000057 WO 20110110
- 主分类号： C23C14/32
- IPC分类号： C23C14/32
摘要：
The present invention relates to a target for an ARC source having a first body (3) of a material to be vaporized, which essentially comprises in one plane a surface which is intended to be vaporized, wherein the surface surrounds in this plane a central area, characterized in that in the central area a second body (7) is provided, which is preferably in the form of a disk and is electrically isolated from the first body (3), in such a way that the second body (7) can essentially provide no electrons for maintaining a spark.
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