发明申请
US20130134326A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, TARGET COLLECTION DEVICE, AND TARGET COLLECTION METHOD
审中-公开
极光紫外线发光装置，目标收集装置和目标收集方法
- 专利标题： EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, TARGET COLLECTION DEVICE, AND TARGET COLLECTION METHOD
- 专利标题（中）： 极光紫外线发光装置，目标收集装置和目标收集方法
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申请号： US13595312申请日： 2012-08-27
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公开(公告)号： US20130134326A1公开(公告)日： 2013-05-30
- 发明人: Takayuki Yabu , Youichi Sasaki , Yulaka Shiraishi , Shinji Nagai , Osamu Wakabayashi
- 申请人： Takayuki Yabu , Youichi Sasaki , Yulaka Shiraishi , Shinji Nagai , Osamu Wakabayashi
- 优先权： JP2011-256858 20111124; JP2012-134801 20120614
- 主分类号： G21K5/02
- IPC分类号： G21K5/02 ; B65B63/08
摘要：
A target collection device may include a collection container having an opening through which a target material is collected into the collection container, and a temperature adjuster configured to adjust a temperature of the collection container to a temperature that is equal to or higher than a melting point of the target material. The target collection device may be part of an extreme ultraviolet light generation apparatus. Methods of target collection are also provided.
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