Invention Application
- Patent Title: PROCESSING SYSTEM
- Patent Title (中): 加工系统
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Application No.: US13731340Application Date: 2012-12-31
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Publication No.: US20130134328A1Publication Date: 2013-05-30
- Inventor: Holger Doemer , Stefan Martens , Walter Mack
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: CARL ZEISS MICROSCOPY GMBH
- Current Assignee: CARL ZEISS MICROSCOPY GMBH
- Current Assignee Address: DE Jena
- Priority: DE102008045336.6 20080901
- Main IPC: G21K5/00
- IPC: G21K5/00

Abstract:
A processing system includes a particle beam column for generating a particle beam directed to a first processing location; a laser system for generating a laser beam directed to a second processing location located at a distance from the first processing location; and a protector including an actuator and a plate connected to the actuator. The actuator is configured to move the plate between a first position in which it protects a component of the particle beam column from particles released from the object by the laser beam and a second position in which the component of the particle beam column is not protected from particles released from the object by the laser beam.
Public/Granted literature
- US08558174B2 Processing system Public/Granted day:2013-10-15
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