- 专利标题: POLISHING PAD WITH GROOVED FOUNDATION LAYER AND POLISHING SURFACE LAYER
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申请号: US13306849申请日: 2011-11-29
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公开(公告)号: US20130137349A1公开(公告)日: 2013-05-30
- 发明人: Paul Andre Lefevre , William C. Allison , Diane Scott , James P. LaCasse
- 申请人: Paul Andre Lefevre , William C. Allison , Diane Scott , James P. LaCasse
- 主分类号: B24D11/00
- IPC分类号: B24D11/00 ; B24D18/00
摘要:
Polishing pads with grooved foundation layers and polishing surface layers are described. In an example, a polishing pad for polishing a substrate includes a foundation layer having a pattern of grooves disposed therein. A continuous polishing surface layer is attached to the pattern of grooves of the foundation layer. In another example, a polishing pad for polishing a substrate includes a foundation layer with a surface having a pattern of protrusions disposed thereon. Each protrusion has a top surface and sidewalls. A non-continuous polishing surface layer is attached to the foundation layer and includes discrete portions. Each discrete portion is attached to the top surface of a corresponding one of the protrusions of the foundation layer. Methods of fabricating polishing pads with a polishing surface layer bonded to a grooved foundation layer are also described.
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