发明申请
- 专利标题: METHOD FOR PRODUCING AN OPTOELECTRONIC SEMICONDUCTOR CHIP, AND OPTOELECTRONIC SEMICONDUCTOR CHIP
- 专利标题(中): 用于生产光电半导体芯片的方法和光电半导体芯片
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申请号: US13704600申请日: 2011-05-26
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公开(公告)号: US20130140598A1公开(公告)日: 2013-06-06
- 发明人: Lutz Höppel , Norwin Von Malm
- 申请人: Lutz Höppel , Norwin Von Malm
- 申请人地址: DE Regensburg
- 专利权人: OSRAM OPTO SEMICONDUCTORS GMBH
- 当前专利权人: OSRAM OPTO SEMICONDUCTORS GMBH
- 当前专利权人地址: DE Regensburg
- 优先权: DE102010024079.6 20100617
- 国际申请: PCT/EP2011/058653 WO 20110526
- 主分类号: H01L33/46
- IPC分类号: H01L33/46 ; H01L31/0232
摘要:
A method for producing an optoelectronic semiconductor chip is specified, comprising the following steps: providing an n-conducting layer (2), arranging a p-conducting layer (4) on the n-conducting layer (2), arranging a metal layer sequence (5) on the p-conducting layer (4),arranging a mask (6) at that side of the metal layer sequence (5) which is remote from the p-conducting layer (4),in places removing the metal layer sequence (5) and uncovering the p-conducting layer (4) using the mask (6), and in places neutralizing or removing the uncovered regions (4a) of the p-conducting layer (4) as far as the n-conducting layer (2) using the mask (6), wherein the metal layer sequence (5) comprises at least one mirror layer (51) and a barrier layer (52), and the mirror layer (51) of the metal layer sequence (5) faces the p-conducting layer (4).
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