发明申请
US20130145507A1 SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME
有权
扫描探针显微镜和使用其的样品观察方法
- 专利标题: SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME
- 专利标题(中): 扫描探针显微镜和使用其的样品观察方法
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申请号: US13586754申请日: 2012-08-15
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公开(公告)号: US20130145507A1公开(公告)日: 2013-06-06
- 发明人: Toshihiko NAKATA , Masahiro WATANABE , Takashi INOUE , Kishio HIDAKA , Motoyuki HIROOKA
- 申请人: Toshihiko NAKATA , Masahiro WATANABE , Takashi INOUE , Kishio HIDAKA , Motoyuki HIROOKA
- 优先权: JP2007-061201 20070312; JP2007-322722 20071214
- 主分类号: G01Q60/18
- IPC分类号: G01Q60/18
摘要:
In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.