发明申请
US20130152687A1 INERTIAL SENSOR AND METHOD FOR MEASURING ACCELERATION USING THE SAME
有权
惯性传感器和使用该传感器测量加速度的方法
- 专利标题: INERTIAL SENSOR AND METHOD FOR MEASURING ACCELERATION USING THE SAME
- 专利标题(中): 惯性传感器和使用该传感器测量加速度的方法
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申请号: US13440809申请日: 2012-04-05
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公开(公告)号: US20130152687A1公开(公告)日: 2013-06-20
- 发明人: Seung Heon Han , Jung Eun Noh , Jong Woon Kim , Sang Jin Kim , Yun Sung Kang , Won Kyu Jeung
- 申请人: Seung Heon Han , Jung Eun Noh , Jong Woon Kim , Sang Jin Kim , Yun Sung Kang , Won Kyu Jeung
- 申请人地址: KR Gyunggi-do
- 专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人地址: KR Gyunggi-do
- 优先权: KR1020110134587 20111214
- 主分类号: G01P15/09
- IPC分类号: G01P15/09
摘要:
Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art.
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