发明申请
- 专利标题: FETs with Hybrid Channel Materials
- 专利标题(中): 混合通道材料的FET
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申请号: US13326825申请日: 2011-12-15
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公开(公告)号: US20130153964A1公开(公告)日: 2013-06-20
- 发明人: Dechao Guo , Shu-Jen Han , Edward William Kiewra , Kuen-Ting Shiu
- 申请人: Dechao Guo , Shu-Jen Han , Edward William Kiewra , Kuen-Ting Shiu
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/8238
摘要:
Techniques for employing different channel materials within the same CMOS circuit are provided. In one aspect, a method of fabricating a CMOS circuit includes the following steps. A wafer is provided having a first semiconductor layer on an insulator. STI is used to divide the first semiconductor layer into a first active region and a second active region. The first semiconductor layer is recessed in the first active region. A second semiconductor layer is epitaxially grown on the first semiconductor layer, wherein the second semiconductor layer comprises a material having at least one group III element and at least one group V element. An n-FET is formed in the first active region using the second semiconductor layer as a channel material for the n-FET. A p-FET is formed in the second active region using the first semiconductor layer as a channel material for the p-FET.
公开/授权文献
- US08610172B2 FETs with hybrid channel materials 公开/授权日:2013-12-17
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