发明申请
US20130156365A1 Fiber to Wafer Interface 失效
光纤到晶圆接口

Fiber to Wafer Interface
摘要:
An interface device includes a body portion having a single-mode waveguide portion including a substantially optically transparent material, a cladding portion defined by channels contacting the waveguide portion, the cladding portion including a substantially optically transparent polymer material, an engagement feature operative to engage a portion of a wafer, and a guide portion operative to engage a portion of an optical fiber ferrule.
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