发明申请
- 专利标题: FABRICATION OF FLOATING GUARD RINGS USING SELECTIVE REGROWTH
- 专利标题(中): 使用选择性重制的浮动护环的制造
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申请号: US13335355申请日: 2011-12-22
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公开(公告)号: US20130164893A1公开(公告)日: 2013-06-27
- 发明人: Linda Romano , David P. Bour , Andrew Edwards , Hui Nie , Isik C. Kizilyalli , Richard J. Brown , Thomas R. Prunty
- 申请人: Linda Romano , David P. Bour , Andrew Edwards , Hui Nie , Isik C. Kizilyalli , Richard J. Brown , Thomas R. Prunty
- 申请人地址: US CA San Jose
- 专利权人: EPOWERSOFT, INC.
- 当前专利权人: EPOWERSOFT, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L21/337
- IPC分类号: H01L21/337 ; H01L21/20
摘要:
A method for fabricating edge termination structures in gallium nitride (GaN) materials includes providing a n-type GaN substrate having a first surface and a second surface, forming an n-type GaN epitaxial layer coupled to the first surface of the n-type GaN substrate, and forming a growth mask coupled to the n-type GaN epitaxial layer. The method further includes patterning the growth mask to expose at least a portion of the n-type GaN epitaxial layer, and forming at least one p-type GaN epitaxial structure coupled to the at least a portion of the n-type GaN epitaxial layer. The at least one p-type GaN epitaxial structure comprises at least one portion of an edge termination structure. The method additionally includes forming a first metal structure electrically coupled to the second surface of the n-type GaN substrate.
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