发明申请
US20130168255A1 COPPER-ELECTROPLATING COMPOSITION AND PROCESS FOR FILLING A CAVITY IN A SEMICONDUCTOR SUBSTRATE USING THIS COMPOSITION
审中-公开
铜电镀组合物和使用该组合物在半导体衬底中填充空穴的方法
- 专利标题: COPPER-ELECTROPLATING COMPOSITION AND PROCESS FOR FILLING A CAVITY IN A SEMICONDUCTOR SUBSTRATE USING THIS COMPOSITION
- 专利标题(中): 铜电镀组合物和使用该组合物在半导体衬底中填充空穴的方法
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申请号: US13703515申请日: 2011-06-09
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公开(公告)号: US20130168255A1公开(公告)日: 2013-07-04
- 发明人: Nadia Frederich , Frédéric Raynal , José Gonzalez
- 申请人: Nadia Frederich , Frédéric Raynal , José Gonzalez
- 申请人地址: FR Massy
- 专利权人: ALCHIMER
- 当前专利权人: ALCHIMER
- 当前专利权人地址: FR Massy
- 优先权: FR1054668 20100611; FR1151583 20110225
- 国际申请: PCT/EP2011/059581 WO 20110609
- 主分类号: C25D3/38
- IPC分类号: C25D3/38
摘要:
The subject-matter of the present invention is a composition especially intended for filling, by the electroplating of copper, a cavity in a semiconductor substrate such as a “through-via” structure for the production of interconnects in three-dimensional integrated circuits.According to the invention, this composition comprises in solution in a solvent: copper ions in a concentration lying between 45 and 1500 mM; a complexing agent for the copper consisting of at least one compound chosen from aliphatic polyamines having 2 to 4 amino groups, preferably ethylenediamine, in a concentration lying between 45 and 3000 mM; the molar ratio between the copper and said complexing agent lying between 0.1 and 5; thiodiglycolic acid in a concentration lying between 1 and 500 mg/l; and optionally a buffer system, in particular ammonium sulfate, in a concentration lying between 0.1 and 3M.
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