发明申请
- 专利标题: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
- 专利标题(中): 三维半导体存储器件
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申请号: US13779334申请日: 2013-02-27
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公开(公告)号: US20130171806A1公开(公告)日: 2013-07-04
- 发明人: Sunil Shim , Sunghoi Hur , Hansoo Kim , Jaehoon Jang , Hoosung Cho
- 申请人: Sunil Shim , Sunghoi Hur , Hansoo Kim , Jaehoon Jang , Hoosung Cho
- 优先权: KR10-2009-0110975 20091117
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Provided is a three-dimensional semiconductor memory device. The three-dimensional semiconductor memory device includes a substrate that has a cell array region including a pair of sub-cell regions and a strapping region interposed between the pair of sub-cell regions. A Plurality of sub-gates are sequentially stacked on the substrate in each of the sub-cell regions, and interconnections are electrically connected to extensions of the stacked sub-gates, respectively, which extend into the strapping region. Each of the interconnections is electrically connected to the extensions of the sub-gate which are disposed in the pair of the sub-cell regions, respectively, and which are located at the same level.
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