发明申请
- 专利标题: DEFECT CLASSIFICATION APPARATUS
- 专利标题(中): 缺陷分类设备
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申请号: US13703536申请日: 2011-06-08
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公开(公告)号: US20130173508A1公开(公告)日: 2013-07-04
- 发明人: Kazunori Anayama , Tetsuya Yadoguchi , Toshiyuki Suzuma , Eiji Honda , Takahiro Okada , Shinya Yoshikawa , Tamotsu Nishimine
- 申请人: Kazunori Anayama , Tetsuya Yadoguchi , Toshiyuki Suzuma , Eiji Honda , Takahiro Okada , Shinya Yoshikawa , Tamotsu Nishimine
- 申请人地址: JP Tokyo
- 专利权人: NIPPON STEEL & SUMITOMO METAL CORPORATION
- 当前专利权人: NIPPON STEEL & SUMITOMO METAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-135218 20100614
- 国际申请: PCT/JP2011/063119 WO 20110608
- 主分类号: G06N99/00
- IPC分类号: G06N99/00
摘要:
The present invention has its objective to provide a defect classification apparatus which suppresses over-fitting and accurately classify the defect type of a defect. A defect classification apparatus is provided in which a data point indicating feature information of a defect to be classified having an unknown defect type is mapped to a point in a mapping space having a dimensional number higher than the number of features constituting the feature information, and the defect type of the defect to be classified is classified based on in which of two regions of defect type, which are formed by separating the mapping space by a decision boundary, the mapped point is located, wherein a discriminant function indicating the decision boundary is determined by adopting a weight which minimizes the sum of the classification error, which corresponds to the accuracy in classifying a training defect dataset, and a regularization term, which has a positive correlation with the dimensional number of the decision boundary, as the weight for each feature constituting the discriminant function.
公开/授权文献
- US08977580B2 Defect classification apparatus 公开/授权日:2015-03-10