发明申请
- 专利标题: LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR
- 专利标题(中): LITHOGRAPHIC装置和LORENTZ执行器
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申请号: US13737848申请日: 2013-01-09
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公开(公告)号: US20130175884A1公开(公告)日: 2013-07-11
- 发明人: Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
- 申请人: Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: H02K1/06
- IPC分类号: H02K1/06
摘要:
A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.
公开/授权文献
- US09293951B2 Lithographic apparatus and lorentz actuator 公开/授权日:2016-03-22
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