发明申请
- 专利标题： BULK ACOUSTIC WAVE RESONATOR
- 专利标题（中）： 大容量声波谐振器
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申请号： US13686005申请日： 2012-11-27
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公开(公告)号： US20130181579A1公开(公告)日： 2013-07-18
- 发明人: Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
- 申请人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
- 优先权： KR10-2012-0005760 20120118
- 主分类号： H01L41/107
- IPC分类号： H01L41/107
摘要：
Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
公开/授权文献
- US09899593B2 Bulk acoustic wave resonator 公开/授权日：2018-02-20
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