公开(公告)号：US20130181579A1

公开(公告)日：2013-07-18

申请号：US13686005

申请日：2012-11-27

申请人： Jea Shik Shin ,  Duck Hwan Kim ,  Chul Soo Kim ,  Ho Soo Park ,  Sang Uk Son ,  In Sang Song ,  Moon Chul Lee ,  Cui Jing

发明人： Jea Shik Shin ,  Duck Hwan Kim ,  Chul Soo Kim ,  Ho Soo Park ,  Sang Uk Son ,  In Sang Song ,  Moon Chul Lee ,  Cui Jing

IPC分类号： H01L41/107

CPC分类号： H01L41/107 ,  H03H9/02102 ,  H03H9/0211 ,  H03H9/173 ,  H03H9/174 ,  H03H9/175

摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.

摘要翻译： 提供了一种体声波谐振器（BAWR）。 BAWR可以包括设置在基板上的空气腔，包括压电层的体声波谐振单元和反射层，以反射从压电层产生的谐振频率的波。

公开(公告)号：US20130099122A1

公开(公告)日：2013-04-25

申请号：US13616445

申请日：2012-09-14

申请人： Ho Soo PARK ,  In Sang SONG ,  Duck Hwan KIM ,  Chul Soo KIM ,  Sang Uk SON ,  Jea Shik SHIN ,  Cui Jing

发明人： Ho Soo PARK ,  In Sang SONG ,  Duck Hwan KIM ,  Chul Soo KIM ,  Sang Uk SON ,  Jea Shik SHIN ,  Cui Jing

IPC分类号： G01K11/26 ,  G01J5/10

CPC分类号： G01J5/44

摘要： A temperature sensing apparatus and method are described to detect a change in a frequency due to a change in a temperature. An infrared light sensing apparatus and method are also provided. The temperature sensing apparatus may include an electrode to generate an electrical signal, a piezoelectric layer to convert the electrical signal into an acoustic wave, and a temperature sensitive layer formed by doping impurities in one or more structures formed on a substrate. Additionally, the infrared light sensing apparatus may convert into heat infrared light incident to an infrared light absorption layer, using an infrared light reflection layer and the infrared light absorption layer. A temperature sensitive layer may detect a change in a resonant frequency based on a change in a temperature of the heat, and may detect a change in infrared light based on the change in the resonant frequency.

摘要翻译： 描述了一种温度检测装置和方法，以检测由于温度变化引起的频率变化。 还提供了一种红外光感测装置和方法。 温度检测装置可以包括用于产生电信号的电极，将电信号转换成声波的压电层，以及通过在衬底上形成的一个或多个结构中掺杂杂质形成的温度敏感层。 此外，红外光检测装置可以使用红外光反射层和红外光吸收层转换入入红外光吸收层的热红外光。 温度敏感层可以基于热的温度的变化来检测谐振频率的变化，并且可以基于谐振频率的变化来检测红外光的变化。

公开(公告)号：US08987666B2

公开(公告)日：2015-03-24

申请号：US13616445

申请日：2012-09-14

申请人： Ho Soo Park ,  In Sang Song ,  Duck Hwan Kim ,  Chul Soo Kim ,  Sang Uk Son ,  Jea Shik Shin ,  Cui Jing

发明人： Ho Soo Park ,  In Sang Song ,  Duck Hwan Kim ,  Chul Soo Kim ,  Sang Uk Son ,  Jea Shik Shin ,  Cui Jing

IPC分类号： G01J5/44

CPC分类号： G01J5/44

摘要： A temperature sensing apparatus and method are described to detect a change in a frequency due to a change in a temperature. An infrared light sensing apparatus and method are also provided. The temperature sensing apparatus may include an electrode to generate an electrical signal, a piezoelectric layer to convert the electrical signal into an acoustic wave, and a temperature sensitive layer formed by doping impurities in one or more structures formed on a substrate. Additionally, the infrared light sensing apparatus may convert into heat infrared light incident to an infrared light absorption layer, using an infrared light reflection layer and the infrared light absorption layer. A temperature sensitive layer may detect a change in a resonant frequency based on a change in a temperature of the heat, and may detect a change in infrared light based on the change in the resonant frequency.

摘要翻译： 描述了一种温度检测装置和方法，以检测由于温度变化引起的频率变化。 还提供了一种红外光感测装置和方法。 温度检测装置可以包括用于产生电信号的电极，将电信号转换成声波的压电层，以及通过在衬底上形成的一个或多个结构中掺杂杂质形成的温度敏感层。 此外，红外光检测装置可以使用红外光反射层和红外光吸收层转换入入红外光吸收层的热红外光。 温度敏感层可以基于热的温度的变化来检测谐振频率的变化，并且可以基于谐振频率的变化来检测红外光的变化。