发明申请
- 专利标题: COMPONENT HAVING A THROUGH-CONNECTION
- 专利标题(中): 具有通过连接的组件
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申请号: US13744611申请日: 2013-01-18
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公开(公告)号: US20130189483A1公开(公告)日: 2013-07-25
- 发明人: Jochen REINMUTH , Yvonne BERGMANN
- 申请人: Jochen REINMUTH , Yvonne BERGMANN
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 优先权: DE102012200840.3 20120120
- 主分类号: H05K13/00
- IPC分类号: H05K13/00
摘要:
A method is described for manufacturing a component having a through-connection. The method includes providing a substrate; forming a trench structure in the substrate, a substrate area which is completely surrounded by the trench structure being produced; forming a closing layer for closing off the trench structure, a cavity girded by the closing layer being formed in the area of the trench structure; removing substrate material from the substrate area surrounded by the closed-off trench structure; and at least partially filling the substrate area surrounded by the closed-off trench structure with a metallic material. A component having a through-connection is also described.
公开/授权文献
- US08778194B2 Component having a through-connection 公开/授权日:2014-07-15
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