Invention Application
US20130201259A1 INK JET PRINT HEAD WITH PIEZOELECTRIC ACTUATOR 有权
喷墨打印头与压电致动器

INK JET PRINT HEAD WITH PIEZOELECTRIC ACTUATOR
Abstract:
An ink jet print head, having a pressure generation chamber arranged for being in communication with a print head nozzle and an actuator membrane for delimiting the pressure generation chamber. The actuator membrane has a substrate and a piezoelectric actuator provided on the substrate, said piezoelectric actuator having a lower electrode, an upper electrode and at least one piezoelectric layer arranged between the lower electrode and the upper electrode; the substrate and the upper electrode are arranged on opposite sides of the piezoelectric layer, and the upper electrode has a Titanium-Tungsten film.
Public/Granted literature
Information query
Patent Agency Ranking
0/0