发明申请
US20130203194A1 METHOD FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE
有权
生产III族氮化物半导体发光器件的方法
- 专利标题: METHOD FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE
- 专利标题(中): 生产III族氮化物半导体发光器件的方法
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申请号: US13824286申请日: 2011-06-12
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公开(公告)号: US20130203194A1公开(公告)日: 2013-08-08
- 发明人: Shingo Totani , Masashi Deguchi , Miki Moriyama
- 申请人: Shingo Totani , Masashi Deguchi , Miki Moriyama
- 申请人地址: JP Kiyosu-shi
- 专利权人: TOYODA GOSEI CO,. LTD.
- 当前专利权人: TOYODA GOSEI CO,. LTD.
- 当前专利权人地址: JP Kiyosu-shi
- 优先权: JP2010-216670 20100928; JP2011-126840 20110607
- 国际申请: PCT/JP2011/003981 WO 20110612
- 主分类号: H01L33/60
- IPC分类号: H01L33/60
摘要:
Sample A is produced by sequentially forming a first insulating film of SiO2 and a reflective film on a sapphire substrate. Sample B is produced by sequentially forming a first insulating film of SiO2, a reflective film, and a second insulating film of SiO2 on a sapphire substrate. In both samples A and B, the reflectance of the reflective film was measured at a wavelength of 450 nm before and after heat treatment. Heat treatment was performed at 600° C. for three minutes. As shown in FIG. 1, in Al/Ag/Al where Al has a thickness of 1 Å to 30 Å, Ag/Al where Al has a thickness of 20 Å, and Al/Ag/Al/Ag/Al where Al has a thickness of 20 Å, the reflectance was 95% or more, which is equivalent to or higher than that of Ag even after the heat treatment.
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