发明申请
- 专利标题： SUSPENDED MASSES IN MICRO-MECHANICAL DEVICES
- 专利标题（中）： 微机械装置中的悬挂质量
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申请号： US13370555申请日： 2012-02-10
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公开(公告)号： US20130205901A1公开(公告)日： 2013-08-15
- 发明人: Brian D. Homeijer
- 申请人： Brian D. Homeijer
- 主分类号： G01P15/12
- IPC分类号： G01P15/12 ; H01L21/02
摘要：
The micro-mechanical device includes a substrate with an internal cavity, a first surface, and an opposing second surface. A first trench is formed from the first surface of the substrate into the internal cavity. The first trench at least partially defines flexures. A second trench is formed from the second surface of the substrate into the internal cavity and at least partially defines a suspended mass. The suspended mass is connected by the flexures to the substrate.
公开/授权文献
- US08984942B2 Suspended masses in micro-mechanical devices 公开/授权日：2015-03-24
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