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公开(公告)号：US08776337B2
公开(公告)日：2014-07-15
申请号：US12847734
申请日：2010-07-30
申请人： Brian D. Homeijer , Robert G. Walmsley , Rodney L. Alley , Dennis M. Lazaroff , Sara J. Homeijer
发明人： Brian D. Homeijer , Robert G. Walmsley , Rodney L. Alley , Dennis M. Lazaroff , Sara J. Homeijer
IPC分类号： H01G5/16
CPC分类号： G01D5/2415 , G01D5/2412 , H01G5/16 , H01L28/40
摘要： The present disclosure includes methods of forming capacitive sensors. One method includes forming a first electrode array of the capacitive sensor on a first structure. Forming the first electrode array can include: forming a dielectric material on a substrate material; forming an electrode material on the dielectric material; removing portions of the electrode material to form a number of electrodes separated from each other; and removing at least a portion of the dielectric material from between the number of electrodes. The method can include bonding the first structure to a second structure having a second electrode array of the capacitive sensor formed thereon such that the number of electrodes of the first electrode array face a number of electrodes of the second electrode array.
摘要翻译： 本公开包括形成电容式传感器的方法。 一种方法包括在第一结构上形成电容传感器的第一电极阵列。 形成第一电极阵列可以包括：在衬底材料上形成电介质材料; 在电介质材料上形成电极材料; 去除电极材料的部分以形成彼此分离的多个电极; 以及从所述多个电极之间去除所述电介质材料的至少一部分。 该方法可以包括将第一结构接合到具有形成在其上的电容传感器的第二电极阵列的第二结构，使得第一电极阵列的电极的数量面对第二电极阵列的多个电极。
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公开(公告)号：US20120025851A1
公开(公告)日：2012-02-02
申请号：US12847734
申请日：2010-07-30
申请人： Brian D. Homeijer , Robert G. Walmsley , Rodney L. Alley , Dennis M. Lazaroff , Sara J. Homeijer
发明人： Brian D. Homeijer , Robert G. Walmsley , Rodney L. Alley , Dennis M. Lazaroff , Sara J. Homeijer
CPC分类号： G01D5/2415 , G01D5/2412 , H01G5/16 , H01L28/40
摘要： The present disclosure includes capacitive sensors and methods of forming capacitive sensors. One capacitive sensor includes a first substrate structure having a first dielectric material formed thereon and electrodes of a first electrode array formed on the first dielectric material. The sensor includes a second substrate structure facing the first substrate structure and having a second dielectric material formed thereon and electrodes of a second electrode array formed on the second dielectric material. The sensor includes a removed portion of the first dielectric material forming a recess between adjacent electrodes of the first electrode array, and the first substrate structure is moveable with respect to the second substrate structure.
摘要翻译： 本公开包括电容传感器和形成电容式传感器的方法。 一个电容传感器包括其上形成有第一电介质材料的第一衬底结构和形成在第一电介质材料上的第一电极阵列的电极。 该传感器包括面向第一衬底结构并具有形成在其上的第二电介质材料和形成在第二电介质材料上的第二电极阵列的电极的第二衬底结构。 传感器包括第一介电材料的去除部分，在第一电极阵列的相邻电极之间形成凹槽，并且第一衬底结构可相对于第二衬底结构移动。
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公开(公告)号：US09403671B2
公开(公告)日：2016-08-02
申请号：US14116092
申请日：2011-06-30
CPC分类号： B81B3/0064 , B81B2201/0235 , B81C99/003 , G01H11/00 , G01V1/162 , G01V13/00
摘要： A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.
摘要翻译： 微机电系统（MEMS）传感器被激发。 测量MEMS传感器的响应。 MEMS传感器被校准。
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公开(公告)号：US20130205901A1
公开(公告)日：2013-08-15
申请号：US13370555
申请日：2012-02-10
申请人： Brian D. Homeijer
发明人： Brian D. Homeijer
CPC分类号： G01P15/0802 , G01P2015/0814 , G01P2015/0871
摘要： The micro-mechanical device includes a substrate with an internal cavity, a first surface, and an opposing second surface. A first trench is formed from the first surface of the substrate into the internal cavity. The first trench at least partially defines flexures. A second trench is formed from the second surface of the substrate into the internal cavity and at least partially defines a suspended mass. The suspended mass is connected by the flexures to the substrate.
摘要翻译： 微机械装置包括具有内腔的基板，第一表面和相对的第二表面。 第一沟槽从衬底的第一表面形成到内腔中。 第一沟槽至少部分地限定弯曲。 第二沟槽从衬底的第二表面形成到内部空腔中并且至少部分地限定悬浮质量。 悬浮质量通过挠曲件连接到基底。
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公开(公告)号：US08984942B2
公开(公告)日：2015-03-24
申请号：US13370555
申请日：2012-02-10
申请人： Brian D. Homeijer
发明人： Brian D. Homeijer
IPC分类号： G01P15/12
CPC分类号： G01P15/0802 , G01P2015/0814 , G01P2015/0871
摘要： The micro-mechanical device includes a substrate with an internal cavity, a first surface, and an opposing second surface. A first trench is formed from the first surface of the substrate into the internal cavity. The first trench at least partially defines flexures. A second trench is formed from the second surface of the substrate into the internal cavity and at least partially defines a suspended mass. The suspended mass is connected by the flexures to the substrate.
摘要翻译： 微机械装置包括具有内腔的基板，第一表面和相对的第二表面。 第一沟槽从衬底的第一表面形成到内腔中。 第一沟槽至少部分地限定弯曲。 第二沟槽从衬底的第二表面形成到内部空腔中并且至少部分地限定悬浮质量。 悬浮质量通过挠曲件连接到基底。
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公开(公告)号：US20130055813A1
公开(公告)日：2013-03-07
申请号：US13697234
申请日：2010-05-12
IPC分类号： G01P15/125
CPC分类号： H01G5/18 , G01P15/125 , G01P2015/0808 , G01P2015/0814 , H01G5/011
摘要： An accelerometer can include a support structure having situated thereupon a stator electrode array including multiple stator electrodes (e.g., A, B, and C); and a proof mass positioned parallel to the stator electrode array and capable of displacement parallel thereto. A translator electrode array facing the stator electrode array can comprise multiple translator electrodes (e.g., a and b) can be situated on the proof mass. Further included is a drive circuitry to apply drive voltages to six capacitances formed by the stator and translator electrodes. The total force exerted on the proof mass by the drive voltages is held constant at about zero.
摘要翻译： 加速度计可以包括一个支撑结构，该支撑结构位于包括多个定子电极（例如A，B和C）的定子电极阵列之上; 以及与定子电极阵列平行定位且能够平行移动的检测质量块。 面向定子电极阵列的平移电极阵列可以包括多个平移电极（例如，a和b）可以位于证明物质上。 还包括驱动电路，用于将驱动电压施加到由定子和转换器电极形成的六个电容。 通过驱动电压施加在检验质量上的总力保持恒定在大约零。
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公开(公告)号：US09027402B2
公开(公告)日：2015-05-12
申请号：US13643883
申请日：2010-04-30
IPC分类号： G01P15/125 , G01P21/00 , G01P15/08
CPC分类号： G01P15/125 , G01P21/00 , G01P2015/0814
摘要： An acceleration-sensing device having error correction includes a stator having at least one conductor affixed to a surface and a proof mass having a first conductor affixed at a first location relative to the at least one conductor affixed to a surface of the stator. The proof mass includes a second conductor affixed at a second location relative to the at least one conductor affixed to a surface of the stator, wherein an excitation signal applied to the first conductor of the proof mass brings about a force on the proof mass in the plane of motion of the proof mass that is substantially equally opposed by a force resulting from an excitation signal applied to the second conductor of the proof mass in the plane of motion of the proof mass.
摘要翻译： 具有误差校正的加速度感测装置包括具有固定在表面上的至少一个导体的定子和具有固定在第一位置的第一导体的检测质量块，该第一导体相对于固定在定子表面上的至少一个导体固定。 检测质量包括固定在第二位置的第二导体，其相对于固定到定子表面的至少一个导体，其中施加到证明物质的第一导体的激发信号在该质量块的第一导体上产生一个力 所述检验质量块的运动平面基本上等同地由施加到证明物质运动平面中的证明物质的第二导体的激发信号产生的力相反。
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公开(公告)号：US20130036789A1
公开(公告)日：2013-02-14
申请号：US13643883
申请日：2010-04-30
IPC分类号： G01P21/00
CPC分类号： G01P15/125 , G01P21/00 , G01P2015/0814
摘要： An acceleration-sensing device having error correction includes a stator having at least one conductor affixed to a surface and a proof mass having a first conductor affixed at a first location relative to the at least one conductor affixed to a surface of the stator. The proof mass includes a second conductor affixed at a second location relative to the at least one conductor affixed to a surface of the stator, wherein an excitation signal applied to the first conductor of the proof mass brings about a force on the proof mass in the plane of motion of the proof mass that is substantially equally opposed by a force resulting from an excitation signal applied to the second conductor of the proof mass in the plane of motion of the proof mass.
摘要翻译： 具有误差校正的加速度感测装置包括具有固定在表面上的至少一个导体的定子和具有固定在第一位置的第一导体的检测质量块，该第一导体相对于固定在定子表面上的至少一个导体固定。 检测质量包括固定在第二位置的第二导体，其相对于固定到定子表面的至少一个导体，其中施加到证明物质的第一导体的激发信号在该质量块的第一导体上产生一个力 所述检验质量块的运动平面基本上等同地由施加到证明物质运动平面中的证明物质的第二导体的激发信号产生的力相反。
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