发明申请
- 专利标题： MEMS ELEMENT AND ELECTRICAL DEVICE USING THE SAME
- 专利标题（中）： 使用其的MEMS元件和电气设备
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申请号： US13590439申请日： 2012-08-21
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公开(公告)号： US20130214366A1公开(公告)日： 2013-08-22
- 发明人: Yasuyuki NAITO , Philippe Helin , Hendrikus Tilmans
- 申请人： Yasuyuki NAITO , Philippe Helin , Hendrikus Tilmans
- 优先权： JP2011-180432 20110822
- 主分类号： H01L29/84
- IPC分类号： H01L29/84
摘要：
In a MEMS element 500 where a MEMS structure 201 is hermetically sealed in a cavity 110 by a substrate 301 and laminated structure 120, interface sealing layers 101, 102 and 103 are provided between two layers that constitute the laminated structure 120, so as to prevent gas from breaking into the cavity 110 through the interface between two layers along the direction parallel to the surface of the substrate 301.
公开/授权文献
- US08610224B2 MEMS element and electrical device using the same 公开/授权日：2013-12-17
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