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公开(公告)号：US08610224B2
公开(公告)日：2013-12-17
申请号：US13590439
申请日：2012-08-21
CPC分类号： H01L29/84 , B81C1/00293
摘要： In a MEMS element 500 where a MEMS structure 201 is hermetically sealed in a cavity 110 by a substrate 301 and laminated structure 120, interface sealing layers 101, 102 and 103 are provided between two layers that constitute the laminated structure 120, so as to prevent gas from breaking into the cavity 110 through the interface between two layers along the direction parallel to the surface of the substrate 301.
摘要翻译： 在通过基板301和层叠结构120将MEMS结构201气密地密封在空腔110中的MEMS元件500中，在构成层叠结构120的两层之间设置界面密封层101,102和103，以防止 气体沿着平行于衬底301的表面的方向通过两层之间的界面而进入空腔110。
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公开(公告)号：US06847756B2
公开(公告)日：2005-01-25
申请号：US10391336
申请日：2003-03-18
申请人： Diaa Khalil , Kareem Madkour , Bassam Saadany , Tarek Badreldin , Philippe Helin
发明人： Diaa Khalil , Kareem Madkour , Bassam Saadany , Tarek Badreldin , Philippe Helin
CPC分类号： G02B6/3582 , G02B6/3512 , G02B6/3546 , G02B6/356 , G02B6/3584 , G02B6/3596
摘要： An optical switching matrix, including optical input fibers (12) and optical output fibers (14) oriented substantially perpendicular to each other, moveable mirrors (5, 13) placed at the intersections of the directions defined by the various optical fibers, each mirror (13) being capable of moving in order to reflect a beam coming from an optical input fiber, bound for an optical output fiber, and a set of channels defined between the mirrors, inside which the various beams are propagated before and after having encountered the mirrors. The set of mirrors are made on a first substrate wafer (2) that is covered with a second substrate wafer (20), and the various channels (38) are formed between protruding zones (34) present under the second substrate wafers. The protruding zones include housings (33) inside which the moveable mirrors are able to move.
摘要翻译： 一种光学开关矩阵，包括基本上彼此垂直定向的光输入光纤（12）和光输出光纤（14），可移动的反射镜（5,13）位于由各种光纤限定的方向的交点处，每个反射镜 13）能够移动以反射来自光输入光纤的束，光束输出光纤被限定，并且在反射镜之间限定的一组通道，其中各个光束在遇到镜子之前和之后传播 。 所述一组反射镜在被第二衬底晶片（20）覆盖的第一衬底晶片（2）上制成，并且各个通道（38）形成在存在于第二衬底晶片之下的突出区域（34）之间。 突出区域包括可移动反射镜能够移动的壳体（33）。
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公开(公告)号：US06740537B2
公开(公告)日：2004-05-25
申请号：US10205724
申请日：2002-07-26
申请人： Philippe Helin
发明人： Philippe Helin
IPC分类号： H01L2100
CPC分类号： G02B6/3584 , G02B6/266 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B26/0841 , G02B2006/12104
摘要： A process for fabricating a microelectromechanical optical component from a silicon substrate is disclosed. The component comprises optical propagation guides; a wall which can move with respect to the propagation guides; and an electrostatic actuator associated with return means formed by at least one beam capable of causing the moving wall to move with respect to the rest of the substrate. The substrate is single-crystal silicon having (111) crystallographic planes parallel to the plane of the substrate. The process comprises a first series of deep reactive ion etching steps during which the heights of the moving wall, of the electrodes of the actuator, and of the beams of the return means of the actuator are defined with different values, and a second wet etching step, making it possible to free the moving wall, the electrodes and the beams from the rest of the substrate.
摘要翻译： 公开了一种从硅衬底制造微机电光学元件的工艺。 该组件包括光传播引导件; 相对于传播引导件移动的壁; 以及与由能够使移动壁相对于衬底的其余部分移动的至少一个梁形成的返回装置相关联的静电致动器。 衬底是具有平行于衬底平面的（111）晶面的单晶硅。 该方法包括第一系列深反应离子蚀刻步骤，在该步骤中，移动壁，致动器的电极和致动器的返回装置的梁的高度被限定为不同的值，并且第二湿蚀刻 使得可以将移动的壁，电极和来自基板的其余部分的光束释放。
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4.发明申请公开(公告)号：US20060131424A1
公开(公告)日：2006-06-22
申请号：US11343040
申请日：2006-01-30
申请人： Philippe Helin , Pascal Ransch
发明人： Philippe Helin , Pascal Ransch
CPC分类号： G06K19/063 , G06K19/14 , G06K19/16
摘要： The invention relates to a marking device (1) comprising an element which is made from a semi-conductor material having patterns (2-4, 12-14) which are hollowed out of the face thereof, the arrangement of said patterns being representative of at least one piece of information. The depth of the patterns (2-4, 12-14) can vary from one pattern to another and can adopt a plurality of different values which are representative of an additional piece of information. The invention also relates to an apparatus which is used to detect such marks and to articles having a marking device of said type integrated into the material forming same.
摘要翻译： 本发明涉及一种标记装置（1），该标记装置（1）包括由半导体材料制成的元件，该半导体材料具有从其表面被挖空的图案（2至4,12-14），所述图案的布置代表 至少一条信息。 图案（2 - 4，12 - 14）的深度可以从一种图案变化到另一种图案，并且可以采用代表附加信息片段的多个不同值。 本发明还涉及一种用于检测这种标记的装置以及具有所述类型的标记装置的制品，所述标记装置整合到形成它们的材料中。
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公开(公告)号：US20130214366A1
公开(公告)日：2013-08-22
申请号：US13590439
申请日：2012-08-21
IPC分类号： H01L29/84
CPC分类号： H01L29/84 , B81C1/00293
摘要： In a MEMS element 500 where a MEMS structure 201 is hermetically sealed in a cavity 110 by a substrate 301 and laminated structure 120, interface sealing layers 101, 102 and 103 are provided between two layers that constitute the laminated structure 120, so as to prevent gas from breaking into the cavity 110 through the interface between two layers along the direction parallel to the surface of the substrate 301.
摘要翻译： 在通过基板301和层叠结构120将MEMS结构201气密地密封在空腔110中的MEMS元件500中，在构成层叠结构120的两层之间设置界面密封层101,102和103，以防止 气体沿着平行于衬底301的表面的方向通过两层之间的界面而进入空腔110。
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公开(公告)号：US20120256308A1
公开(公告)日：2012-10-11
申请号：US13444665
申请日：2012-04-11
申请人： Philippe Helin
发明人： Philippe Helin
CPC分类号： B81C1/00333 , B81C2203/0136 , B81C2203/0145
摘要： A method for sealing a cavity is disclosed. The method includes depositing a membrane layer on top of a sacrificial layer, etching release holes into the membrane layer, and removing at least a portion of the sacrificial layer through the release holes to form a cavity. Prior to removing the sacrificial layer portion, the method includes producing a narrowing layer on the side walls of the release holes. The narrowing layer can be a sealing layer that seals off the release holes after a reflow step. Alternatively, the narrowing layer can be a layer that does not have a sealing function and is used to narrow the holes, allowing the holes to be sealed without a sealing or other material entering the cavity. The narrowing layer may be deposited by conformal deposition followed by an anisotropic etch or by direct deposition on the side walls of the release holes.
摘要翻译： 公开了一种用于密封空腔的方法。 该方法包括在牺牲层的顶部上沉积膜层，将释放孔蚀刻到膜层中，以及通过释放孔去除牺牲层的至少一部分以形成空腔。 在去除牺牲层部分之前，该方法包括在释放孔的侧壁上产生变窄层。 变窄层可以是在回流步骤之后密封释放孔的密封层。 或者，变窄层可以是不具有密封功能的层，并且用于缩小孔，允许在没有密封或其它材料进入空腔的情况下密封孔。 可以通过共形沉积，然后通过各向异性蚀刻或通过直接沉积在释放孔的侧壁上来沉积变窄层。
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公开(公告)号：US06711321B2
公开(公告)日：2004-03-23
申请号：US09926152
申请日：2001-09-13
申请人： Philippe Helin , Makoto Mita , Hiroyuki Fujita
发明人： Philippe Helin , Makoto Mita , Hiroyuki Fujita
IPC分类号： G02B626
CPC分类号： G02B6/3584 , G02B6/3514 , G02B6/3546 , G02B6/3562 , G02B6/3566 , G02B6/357 , G02B6/3572 , G02B6/3576
摘要： A mechanical optic switch is disclosed that is of high mirror quality, high in the accuracy of opto-axial alignment between a mirror and a fiber aligning structure and yet of low insertion loss, permitting fiber optic switching by an electromagnetic force. It is made by a crystallographically oriented face dependent etching process, which simultaneously forms in a Si (100) crystallographically faced single crystal substrate (1), V-grooves (3) for fixing optical fibers (2, 2a, 2b, 2c, 2d) with the V-groove's longitudinal axes oriented in the crystallographic direction or in a direction equivalent thereto; and a resilient support beam (5) and a mirror (4, 6) with the longitudinal axis of the resilient support beam and the mirror surface of the mirror oriented in the direction or in a direction equivalent thereto. Slitting into the substrate from a rear surface thereof by etching renders the support beam resilient and flexible.
摘要翻译： 公开了一种机械光学开关，其具有高镜面质量，反射镜和光纤对准结构之间的光轴对准精度高，而且具有低插入损耗，允许通过电磁力进行光纤切换。 它是通过晶体取向的面依赖蚀刻工艺制成的，其同时形成在Si（100）晶面上的单晶衬底（1）中，用于固定光纤（2,2a，2b，2c，2d）的V形槽 ），其中V形槽的纵向轴线在<110>结晶方向或与其等同的方向上取向; 以及弹性支撑梁（5）和反射镜（4,6），其具有弹性支撑梁的纵向轴线并且反射镜的镜面在<100>方向上或沿与其等同的方向上定向。 通过蚀刻从其后表面切入衬底使得支撑梁具有弹性和柔性。
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