Invention Application
- Patent Title: VICINAL SURFACES OF POLYCRYSTALLINE STRUCTURES
- Patent Title (中): 多晶结构的VICINAL SURFACES
-
Application No.: US13774400Application Date: 2013-02-22
-
Publication No.: US20130216780A1Publication Date: 2013-08-22
- Inventor: Boaz POKROY , Shirly BORUKHIN
- Applicant: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.
- Applicant Address: IL Haifa
- Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.
- Current Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.
- Current Assignee Address: IL Haifa
- Main IPC: B82B3/00
- IPC: B82B3/00 ; H01L21/02
Abstract:
The present invention provides vicinal surfaces of polycrystalline materials and a method for their preparation. The method includes the deposition of a polycrystalline material on a substrate followed by removing the material from the substrate so as to expose a vicinal surface having stepped terraces. The step of removing the material from the substrate may be preceded by annealing. The vicinal surfaces are useful for a variety of applications.
Public/Granted literature
- US09446949B2 Vicinal surfaces of polycrystalline structures Public/Granted day:2016-09-20
Information query
