公开(公告)号：US20130216780A1

公开(公告)日：2013-08-22

申请号：US13774400

申请日：2013-02-22

Applicant: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.

Inventor： Boaz POKROY ,  Shirly BORUKHIN

IPC: B82B3/00 ,  H01L21/02

CPC classification number: B82B3/0038 ,  C23C14/0005 ,  C23C16/01 ,  H01L21/02428 ,  Y10T428/24355

Abstract: The present invention provides vicinal surfaces of polycrystalline materials and a method for their preparation. The method includes the deposition of a polycrystalline material on a substrate followed by removing the material from the substrate so as to expose a vicinal surface having stepped terraces. The step of removing the material from the substrate may be preceded by annealing. The vicinal surfaces are useful for a variety of applications.

Abstract translation: 本发明提供多晶材料的连位表面及其制备方法。 该方法包括将多晶材料沉积在基底上，随后从基底上去除材料，以便露出具有梯级台阶的连续表面。 可以在退火之前从衬底去除材料的步骤。 邻位表面可用于各种应用。