发明申请
- 专利标题: INERTIAL SENSOR
- 专利标题(中): 惯性传感器
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申请号: US13592096申请日: 2012-08-22
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公开(公告)号: US20130220015A1公开(公告)日: 2013-08-29
- 发明人: Jung Eun Noh , Seung Heon Han , Jong Woon Kim , Sung Jun Lee , Seung Mo Lim
- 申请人: Jung Eun Noh , Seung Heon Han , Jong Woon Kim , Sung Jun Lee , Seung Mo Lim
- 申请人地址: KR Gyunggi-do
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR Gyunggi-do
- 优先权: KR10-2012-0019870 20120227
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
Disclosed herein is an inertial sensor including: a membrane; first and second driving units provided in a first axis direction (an X axis direction) so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the first axis direction; and third and fourth driving units provided in a second axis direction (a Y axis direction) perpendicular to the first axis direction so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the second axis direction, wherein the first and second driving units have different vibration frequencies so that they vibrate while being expanded and contracted in the opposite manner and then vibrate while being expanded and contracted in the same manner.
公开/授权文献
- US09052195B2 Inertial sensor for detecting angular velocity 公开/授权日:2015-06-09
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