发明申请
US20130224654A1 COPOLYMERS FOR LITHOGRAPHY AND METHOD FOR PRODUCING SAME, RESIST COMPOSITION, METHOD FOR PRODUCING SUBSTRATE WITH PATTERN FORMED THEREUPON, METHOD FOR EVALUATING COPOLYMERS, AND METHOD FOR ANALYZING COPOLYMER COMPOSITIONS 有权
用于制备它的共聚物及其制备方法,耐蚀组合物,用于形成图案的基板的生产方法,用于评价共聚物的方法和分析共聚物组合物的方法

  • 专利标题: COPOLYMERS FOR LITHOGRAPHY AND METHOD FOR PRODUCING SAME, RESIST COMPOSITION, METHOD FOR PRODUCING SUBSTRATE WITH PATTERN FORMED THEREUPON, METHOD FOR EVALUATING COPOLYMERS, AND METHOD FOR ANALYZING COPOLYMER COMPOSITIONS
  • 专利标题(中): 用于制备它的共聚物及其制备方法,耐蚀组合物,用于形成图案的基板的生产方法,用于评价共聚物的方法和分析共聚物组合物的方法
  • 申请号: US13879737
    申请日: 2011-10-14
  • 公开(公告)号: US20130224654A1
    公开(公告)日: 2013-08-29
  • 发明人: Atsushi YasudaTomoya OshikiriHikaru Momose
  • 申请人: Atsushi YasudaTomoya OshikiriHikaru Momose
  • 申请人地址: JP Tokyo
  • 专利权人: Mitsubishi Rayon Co., Ltd.
  • 当前专利权人: Mitsubishi Rayon Co., Ltd.
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2010-233754 20101018; JP2010-233884 20101018
  • 国际申请: PCT/JP2011/073623 WO 20111014
  • 主分类号: G03F7/004
  • IPC分类号: G03F7/004
COPOLYMERS FOR LITHOGRAPHY AND METHOD FOR PRODUCING SAME, RESIST COMPOSITION, METHOD FOR PRODUCING SUBSTRATE WITH PATTERN FORMED THEREUPON, METHOD FOR EVALUATING COPOLYMERS, AND METHOD FOR ANALYZING COPOLYMER COMPOSITIONS
摘要:
A target variable analysis unit (11) calculates the triad fractions of monomer units in the composition of a known polymer sample from the copolymerization reactivity ratios of the monomer units to obtain a target variable. A waveform processing unit (12) processes NMR measurements, signals, etc. An explanatory variable analysis unit (13) obtains explanatory variables from the amount of chemical shift and signal strength in the NMR measurements of the known sample. A model generation unit (14) determines the regression equation of the regression model of the target variable and the explanatory variables by partial least squares regression, and obtains regression model coefficients. A sample analysis unit (15) uses the regression model to calculate the triad fractions for an unknown copolymer sample from the amount of chemical shift and signal strength in the NMR measurements of the unknown copolymer sample. By using a copolymer for lithography in which the total of the triad fractions obtained in this way is not more than 20 mole % in the copolymer, a resist composition with excellent solubility and sensitivity can be manufactured.
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