发明申请
- 专利标题: ABSORPTION DEVICE FOR ROTATABLE HEATING
- 专利标题(中): 用于可旋转加热的吸收装置
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申请号: US13884440申请日: 2010-12-10
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公开(公告)号: US20130228563A1公开(公告)日: 2013-09-05
- 发明人: Shaoyong Wang , Mingbo Wang
- 申请人: Shaoyong Wang , Mingbo Wang
- 申请人地址: CN Shenyang, Liaoning
- 专利权人: SHENYANG SOLIDTOOL CO., LTD.
- 当前专利权人: SHENYANG SOLIDTOOL CO., LTD.
- 当前专利权人地址: CN Shenyang, Liaoning
- 优先权: CN201010555617.1 20101122
- 国际申请: PCT/CN10/79664 WO 20101210
- 主分类号: H01L21/67
- IPC分类号: H01L21/67
摘要:
An absorption device for rotatable heating is provided with an absorption heating plate (102), a support needle driving device (103), a rotary sliding ring (104) and a turning shaft (107). The absorption heating plate (102) is amounted at the top of the turning shaft (107), and a wafer (101) is arranged at the top of the absorption heating plate (102). The rotary sliding ring (104) is connected to the turning shaft (107) in which a vacuum channel and a connection wire channel are arranged. Support needles (111) are connected to the output end of the support needle driving device (103), run through the absorption heating plate (102) and are arranged at the bottom of the wafer (101) uniformly. The absorption device incorporates the wafer absorption function, the wafer rotating function with controllable speed and the heating function for heating the wafer to reach different temperature according to the different requirement, which solves the problem of absorption and heating rotation at the same time.
公开/授权文献
- US09666457B2 Adsorption device for rotatable heating 公开/授权日:2017-05-30
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