Invention Application
- Patent Title: Suppression Of Parasitic Optical Feedback In Pulse Laser Systems
- Patent Title (中): 脉冲激光系统中寄生光反馈的抑制
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Application No.: US13789870Application Date: 2013-03-08
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Publication No.: US20130242380A1Publication Date: 2013-09-19
- Inventor: Konstantin Tsigutkin
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Main IPC: H01S3/10
- IPC: H01S3/10

Abstract:
A pulsed laser system includes a variable attenuator located in a secondary optical path bounded by a target surface and one or more reflective surfaces outside of the primary laser oscillator of the laser system. The variable attenuator isolates an output optical amplifier of the laser system from light reflected from the target during time periods between laser pulses. In some embodiments, the variable attenuator is synchronously controlled with the primary laser oscillator. In some other embodiments, the variable attenuator is controlled separately from the primary laser oscillator to shape the generated laser pulses.
Public/Granted literature
- US08767291B2 Suppression of parasitic optical feedback in pulse laser systems Public/Granted day:2014-07-01
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