发明申请
US20130243680A1 GROUP 13 NITRIDE CRYSTAL AND GROUP 13 NITRIDE CRYSTAL SUBSTRATE
审中-公开
第13组氮化物晶体和第13组氮化物晶体基板
- 专利标题: GROUP 13 NITRIDE CRYSTAL AND GROUP 13 NITRIDE CRYSTAL SUBSTRATE
- 专利标题(中): 第13组氮化物晶体和第13组氮化物晶体基板
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申请号: US13798702申请日: 2013-03-13
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公开(公告)号: US20130243680A1公开(公告)日: 2013-09-19
- 发明人: Masahiro HAYASHI , Seiji SARAYAMA , Takashi SATOH , Chiharu KIMURA , Naoya MIYOSHI , Akishige MURAKAMI , Junichi WADA
- 申请人: Masahiro HAYASHI , Seiji SARAYAMA , Takashi SATOH , Chiharu KIMURA , Naoya MIYOSHI , Akishige MURAKAMI , Junichi WADA
- 申请人地址: JP Tokyo
- 专利权人: RICOH COMPANY, LITD.
- 当前专利权人: RICOH COMPANY, LITD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2012-062235 20120319
- 主分类号: C01B21/064
- IPC分类号: C01B21/064 ; C01B21/06
摘要:
A group 13 nitride crystal has a hexagonal crystal structure containing a nitrogen atom and at least one type of metal atom selected from the group consisting of B, Al, Ga, In, and Tl. The group 13 nitride crystal has a basal plane dislocation in a plurality of directions. Dislocation density of the basal plane dislocation is higher than dislocation density of a threading dislocation of a c-plane.
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