发明申请
- 专利标题： BACKSIDE DEPLETION FOR BACKSIDE ILLUMINATED IMAGE SENSORS
- 专利标题（中）： 背面照明图像传感器的背面
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申请号： US13875659申请日： 2013-05-02
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公开(公告)号： US20130244368A1公开(公告)日： 2013-09-19
- 发明人: Tzu-Hsuan Hsu , Han-Chi Liu , Ching-Chun Hsingjen Wang
- 申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232
摘要：
A backside illuminated image sensor is provided which includes a substrate having a front side and a backside, a sensor formed in the substrate at the front side, the sensor including at least a photodiode, and a depletion region formed in the substrate at the backside, a depth of the depletion region is less than 20% of a thickness of the substrate.
公开/授权文献
- US08759141B2 Backside depletion for backside illuminated image sensors 公开/授权日：2014-06-24
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