发明申请
US20130251999A1 CARBON MATERIAL, JIG, AND METHOD OF MANUFACTURING CARBON MATERIAL
审中-公开
碳材料,制造方法和制造碳材料的方法
- 专利标题: CARBON MATERIAL, JIG, AND METHOD OF MANUFACTURING CARBON MATERIAL
- 专利标题(中): 碳材料,制造方法和制造碳材料的方法
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申请号: US13991739申请日: 2011-07-15
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公开(公告)号: US20130251999A1公开(公告)日: 2013-09-26
- 发明人: Kaoru Setani , Hiroaki Matsunaga , Akiyoshi Takeda
- 申请人: Kaoru Setani , Hiroaki Matsunaga , Akiyoshi Takeda
- 申请人地址: JP Osaka-shi, Osaka
- 专利权人: TOYO TANSO CO., LTD.
- 当前专利权人: TOYO TANSO CO., LTD.
- 当前专利权人地址: JP Osaka-shi, Osaka
- 优先权: JP2010-289642 20101227
- 国际申请: PCT/JP2011/066182 WO 20110715
- 主分类号: H01L21/687
- IPC分类号: H01L21/687
摘要:
A carbon material, a jig, and a method of manufacturing the carbon material are provided that can prevent dust emission and also improve the temperature resistance under a nitrogen atmosphere. In a carbon material having a carbon substrate and a metal carbide layer formed on a surface of the carbon substrate, the metal carbide layer includes molybdenum carbide and/or iron carbide. The carbon substrate embedded in a surface modifying agent containing a pyrolytic hydrogen halide generating agent and molybdenum particles and/or iron particles is heat-treated together with a carbon member other than the carbon substrate.
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