发明申请
US20130255534A1 Method of Preparing Liquid Chemical for Forming Protective Film
审中-公开
制备液体化学品形成保护膜的方法
- 专利标题： Method of Preparing Liquid Chemical for Forming Protective Film
- 专利标题（中）： 制备液体化学品形成保护膜的方法
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申请号： US13688856申请日： 2012-11-29
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公开(公告)号： US20130255534A1公开(公告)日： 2013-10-03
- 发明人: Atsushi RYOKAWA , Shuhei Yamada , Masahiro Fujitani , Soichi Kumon , Masanori Saito , Takashi Saio , Shinobu Arata
- 申请人： Central Glass Company, Limited
- 优先权： JP2011-236561 20111028; JP2011-260869 20111129
- 主分类号： H01L23/29
- IPC分类号： H01L23/29
摘要：
Disclosed herein is a method for preparing a liquid chemical for forming a water-repellent protective film, the liquid chemical being for forming the water-repellent protective film at the time of cleaning a wafer having at its surface an uneven pattern and containing silicon element at least at a part of the uneven pattern at least on surfaces of recessed portions of the uneven pattern, the liquid chemical containing a nonaqueous organic solvent, a silylation agent, and an acid or a base. The method includes (i) adjusting a water content of the nonaqueous organic solvent to 200 mass ppm or less by dehydration; and (ii) mixing the nonaqueous organic solvent, the silylation agent, and the acid or the base after the adjusting step.
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