Invention Application
US20130258784A1 SILICON ON INSULATOR AND THIN FILM TRANSISTOR BANDGAP ENGINEERED SPLIT GATE MEMORY
有权
绝缘子和薄膜晶体管上的绝缘子工程分割栅存储器
- Patent Title: SILICON ON INSULATOR AND THIN FILM TRANSISTOR BANDGAP ENGINEERED SPLIT GATE MEMORY
- Patent Title (中): 绝缘子和薄膜晶体管上的绝缘子工程分割栅存储器
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Application No.: US13899629Application Date: 2013-05-22
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Publication No.: US20130258784A1Publication Date: 2013-10-03
- Inventor: Hang-Ting Lue , Erh-Kun Lai
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L29/66
- IPC: H01L29/66 ; G11C16/04

Abstract:
Memory cells comprising thin film transistor, stacked arrays, employing bandgap engineered tunneling layers in a junction free, NAND configuration. The cells comprise a channel region in a semiconductor strip formed on an insulating layer; a tunnel dielectric structure disposed above the channel region, the tunnel dielectric structure comprising a multilayer structure including at least one layer having a hole-tunneling barrier height lower than that at the interface with the channel region; a charge storage layer disposed above the tunnel dielectric structure; an insulating layer disposed above the charge storage layer; and a gate electrode disposed above the insulating layer Arrays and methods of operation are described.
Public/Granted literature
- US08937340B2 Silicon on insulator and thin film transistor bandgap engineered split gate memory Public/Granted day:2015-01-20
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