A battery fabrication method includes forming on a substrate, at least a portion of a battery cell having a plurality of battery component films that include an underlying film with an overlying metal-containing film. A beam incident area of the metal-containing film is locally heated by directing onto the metal-containing film, an energy beam maintained at a fluence of at least about 800 J/cm2. The metal-containing film is heated to a temperature that is at least 100° C. higher than the temperature attained by the underlying film.