Invention Application
US20130266119A1 MICRO-FOCUS X-RAY GENERATION APPARATUS AND X-RAY IMAGING APPARATUS
审中-公开
微型X射线发生装置和X射线成像装置
- Patent Title: MICRO-FOCUS X-RAY GENERATION APPARATUS AND X-RAY IMAGING APPARATUS
- Patent Title (中): 微型X射线发生装置和X射线成像装置
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Application No.: US13857749Application Date: 2013-04-05
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Publication No.: US20130266119A1Publication Date: 2013-10-10
- Inventor: Osamu Taniguchi , Takao Ogura
- Applicant: CANON KABUSHIKI KAISHA
- Priority: JP2012-089700 20120410
- Main IPC: H01J35/14
- IPC: H01J35/14 ; G01N23/04

Abstract:
A transmission type micro-focus X-ray generation apparatus includes an electron reflector, an electron passage surrounded by the electron reflector, an electron source, and a target. X-rays are generated by irradiating the target with electrons that have been emitted from the electron source and that have passed through the electron passage. The electron passage has a conical shape having a cross-sectional area that increases from an outlet on the target side toward an inlet on the electron source side. A material of the target is molybdenum, tantalum, or tungsten. The atomic number of a material of the electron reflector is greater than or equal to the atomic number of the material of the target.
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