- 专利标题: SEMICONDUCTOR STRUCTURES AND METHODS OF MANUFACTURE
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申请号: US13444343申请日: 2012-04-11
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公开(公告)号: US20130269974A1公开(公告)日: 2013-10-17
- 发明人: Timothy H. DAUBENSPECK , Jeffrey P. GAMBINO , Zhong-Xiang HE , Christopher D. MUZZY , Wolfgang SAUTER , Timothy D. SULLIVAN
- 申请人: Timothy H. DAUBENSPECK , Jeffrey P. GAMBINO , Zhong-Xiang HE , Christopher D. MUZZY , Wolfgang SAUTER , Timothy D. SULLIVAN
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01B3/30
- IPC分类号: H01B3/30 ; H01B13/00 ; H01B13/06 ; H01B7/00
摘要:
Wire-bonded semiconductor structures using organic insulating material and methods of manufacture are disclosed. The method includes forming a metal wiring layer in an organic insulator layer. The method further includes forming a protective layer over the organic insulator layer. The method further includes forming a via in the organic insulator layer over the metal wiring layer. The method further includes depositing a metal layer in the via and on the protective layer. The method further includes patterning the metal layer with an etch chemistry that is damaging to the organic insulator layer.
公开/授权文献
- US08927869B2 Semiconductor structures and methods of manufacture 公开/授权日:2015-01-06
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