Invention Application
- Patent Title: SEMICONDUCTOR STRUCTURES AND METHODS OF MANUFACTURE
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Application No.: US13444343Application Date: 2012-04-11
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Publication No.: US20130269974A1Publication Date: 2013-10-17
- Inventor: Timothy H. DAUBENSPECK , Jeffrey P. GAMBINO , Zhong-Xiang HE , Christopher D. MUZZY , Wolfgang SAUTER , Timothy D. SULLIVAN
- Applicant: Timothy H. DAUBENSPECK , Jeffrey P. GAMBINO , Zhong-Xiang HE , Christopher D. MUZZY , Wolfgang SAUTER , Timothy D. SULLIVAN
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01B3/30
- IPC: H01B3/30 ; H01B13/00 ; H01B13/06 ; H01B7/00

Abstract:
Wire-bonded semiconductor structures using organic insulating material and methods of manufacture are disclosed. The method includes forming a metal wiring layer in an organic insulator layer. The method further includes forming a protective layer over the organic insulator layer. The method further includes forming a via in the organic insulator layer over the metal wiring layer. The method further includes depositing a metal layer in the via and on the protective layer. The method further includes patterning the metal layer with an etch chemistry that is damaging to the organic insulator layer.
Public/Granted literature
- US08927869B2 Semiconductor structures and methods of manufacture Public/Granted day:2015-01-06
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