发明申请
US20130270510A1 NONVOLATILE SEMICONDUCTOR MEMORY ELEMENT, NONVOLATILE SEMICONDUCTOR MEMORY DEVICE, AND METHOD FOR MANUFACTURING NONVOLATILE SEMICONDUCTOR MEMORY DEVICE 有权
非易失性半导体存储器元件,非易失性半导体存储器件及其制造非易失性半导体存储器件的方法

  • 专利标题: NONVOLATILE SEMICONDUCTOR MEMORY ELEMENT, NONVOLATILE SEMICONDUCTOR MEMORY DEVICE, AND METHOD FOR MANUFACTURING NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
  • 专利标题(中): 非易失性半导体存储器元件,非易失性半导体存储器件及其制造非易失性半导体存储器件的方法
  • 申请号: US13996203
    申请日: 2012-06-18
  • 公开(公告)号: US20130270510A1
    公开(公告)日: 2013-10-17
  • 发明人: Satoru FujiiKiyotaka TsujiTakumi Mikawa
  • 申请人: Satoru FujiiKiyotaka TsujiTakumi Mikawa
  • 优先权: JP2011-142372 20110627
  • 国际申请: PCT/JP2012/003958 WO 20120618
  • 主分类号: H01L27/24
  • IPC分类号: H01L27/24 H01L45/00
NONVOLATILE SEMICONDUCTOR MEMORY ELEMENT, NONVOLATILE SEMICONDUCTOR MEMORY DEVICE, AND METHOD FOR MANUFACTURING NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
摘要:
A nonvolatile semiconductor memory element includes: a variable resistance element including a first electrode, a variable resistance layer, and a second electrode, and having a resistance value which changes according to a polarity of an electric pulse applied between the first electrode and the second electrode; and a current steering element which is electrically connected to the variable resistance element, allows a current to flow bidirectionally, and has a nonlinear current-voltage characteristic. The current steering element (i) has a structure in which a first current steering element electrode, a first semiconductor layer, and a second current steering element electrode are stacked in this order, and (ii) includes a second semiconductor layer which covers side surfaces of the first current steering element electrode, the first semiconductor layer, and the second current steering element electrode.
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