发明申请
- 专利标题: FIELD-EFFECT TRANSISTOR AND MANUFACTURING PROCESS THEREOF
- 专利标题(中): 场效应晶体管及其制造工艺
-
申请号: US13877441申请日: 2011-10-05
-
公开(公告)号: US20130270534A1公开(公告)日: 2013-10-17
- 发明人: Do Kyung Hwang , Jungbae Kim , Canek Fuentes-Hernandez , Bernard Kippelen
- 申请人: Do Kyung Hwang , Jungbae Kim , Canek Fuentes-Hernandez , Bernard Kippelen
- 申请人地址: US GA Atlanta
- 专利权人: GEORGIA TECH RESEARCH CORPORATION
- 当前专利权人: GEORGIA TECH RESEARCH CORPORATION
- 当前专利权人地址: US GA Atlanta
- 国际申请: PCT/US11/54989 WO 20111005
- 主分类号: H01L51/05
- IPC分类号: H01L51/05
摘要:
A field-effect transistor includes a gate, a source and a drain; a semiconductor layer between the source and the drain; and a gate insulator between the gate and the semiconductor layer. The gate insulator comprises a first layer adjoining the semiconductor layer; and a second layer. The first layer is formed from an amorphous fluoropolymer having a first dielectric constant and a first thickness. The second layer has a second dielectric constant and a second thickness. The first dielectric constant is smaller than 3, the first thickness is smaller than 200 nm, the second dielectric constant is higher than 5, and the second thickness is smaller than 500 nm.
公开/授权文献
信息查询
IPC分类: