发明申请
- 专利标题: THIN FILM TRANSISTOR AND DISPLAY DEVICE HAVNG THE SAME
- 专利标题(中): 薄膜晶体管和显示器件
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申请号: US13898186申请日: 2013-05-20
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公开(公告)号: US20130270538A1公开(公告)日: 2013-10-17
- 发明人: Jong-Hyun PARK , Chun-Gi YOU , Sun PARK , Jin-Hee KANG , Yul-Kyu LEE
- 申请人: Jong-Hyun PARK , Chun-Gi YOU , Sun PARK , Jin-Hee KANG , Yul-Kyu LEE
- 优先权: KR10-2010-0033524 20100412
- 主分类号: H01L51/52
- IPC分类号: H01L51/52 ; H01L29/786
摘要:
A thin film transistor, a method of manufacturing the same, and a display device including the same, the thin film transistor including a substrate; a polysilicon semiconductor layer on the substrate; and a metal pattern between the semiconductor layer and the substrate, the metal pattern being insulated from the semiconductor layer, wherein the polysilicon of the semiconductor layer includes a grain boundary parallel to a crystallization growing direction, and a surface roughness of the polysilicon semiconductor layer defined by a distance between a lowest peak and a highest peak in a surface thereof is less than about 15 nm.
公开/授权文献
- US08952368B2 Thin film transistor and display device having the same 公开/授权日:2015-02-10
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