Invention Application
US20130271738A1 MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
审中-公开
可移动身体装置,曝光装置和装置制造方法
- Patent Title: MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Patent Title (中): 可移动身体装置,曝光装置和装置制造方法
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Application No.: US13835786Application Date: 2013-03-15
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Publication No.: US20130271738A1Publication Date: 2013-10-17
- Inventor: Shigeru MORIMOTO
- Applicant: NIKON CORPORATION
- Priority: JP2012-091506 20120413
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A stage device is equipped with two stages that can move along an XY plane above a stage base, a first magnet unit and a second magnet unit provided in the two stages, respectively, a planar motor which has a coil unit including a plurality of coils arranged two-dimensionally above the stage base that drives the two stages by a driving force generated by electromagnetic interaction with each of the first magnet unit and the second magnet unit. In a state where the two stages are in proximity within a predetermined distance or in contact with each other above the stage base in a Y-axis direction, a layout of magnets is decided so that no magnets structuring the first magnet unit and no magnets structuring the second magnet unit simultaneously face the same coil structuring the coil unit.
Information query
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