公开(公告)号：US20130271738A1

公开(公告)日：2013-10-17

申请号：US13835786

申请日：2013-03-15

Applicant: NIKON CORPORATION

Inventor： Shigeru MORIMOTO

IPC: G03F7/20

CPC classification number: G03F7/70758 ,  G03F7/70341

Abstract: A stage device is equipped with two stages that can move along an XY plane above a stage base, a first magnet unit and a second magnet unit provided in the two stages, respectively, a planar motor which has a coil unit including a plurality of coils arranged two-dimensionally above the stage base that drives the two stages by a driving force generated by electromagnetic interaction with each of the first magnet unit and the second magnet unit. In a state where the two stages are in proximity within a predetermined distance or in contact with each other above the stage base in a Y-axis direction, a layout of magnets is decided so that no magnets structuring the first magnet unit and no magnets structuring the second magnet unit simultaneously face the same coil structuring the coil unit.

Abstract translation: 舞台装置配备有两个台阶，它们可以分别沿着平台基座上方的XY平面移动，分别设置在两个阶段中的第一磁体单元和第二磁体单元，平面电动机具有包括多个线圈的线圈单元 通过与第一磁体单元和第二磁体单元中的每一个的电磁相互作用产生的驱动力二维地布置在舞台底座上方驱动两个舞台。 在两级在Y轴方向上在预定距离内接近或者在台架上方彼此接触的状态下，决定磁体的布局，使得不构成第一磁体单元的磁体和不构成磁体的磁体 第二磁体单元同时面对构成线圈单元的相同线圈。

公开(公告)号：US20180046092A1

公开(公告)日：2018-02-15

申请号：US15788745

申请日：2017-10-19

Applicant: NIKON CORPORATION

Inventor： Shigeru MORIMOTO ,  Tadahiro Kominami

IPC: G03F7/20 ,  H02K41/03 ,  H02K9/22 ,  H02K3/47 ,  H02K16/00 ,  H02K9/19

Abstract: A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.

公开(公告)号：US20160189845A1

公开(公告)日：2016-06-30

申请号：US15061857

申请日：2016-03-04

Applicant: CKD CORPORATION ,  NIKON CORPORATION

Inventor： Akihiro ITO ,  Masayuki KOUKETSU ,  Shigeru MORIMOTO ,  Hiromitsu YOSHIMOTO ,  Koji TANAKA

IPC: H01F7/08 ,  H01F7/06

CPC classification number: H01F7/08 ,  H01F5/00 ,  H01F7/06 ,  H01F27/16 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K41/02 ,  H02K2201/18

Abstract: A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.

Abstract translation: 用于第一电磁线圈的冷却结构包括具有沿预定轴线Z的方向延伸的空间的第一电磁线圈; 相对于第一电磁线圈的预定轴线Z的方向安装在端面上并具有用于内部形成的流体的流路的冷却构件; 以及入口管和出口管，其在该空间内分别连接到冷却构件的流动路径的入口和出口，并且延伸穿过该空间到电磁线圈外部的区域。

公开(公告)号：US20160336101A1

公开(公告)日：2016-11-17

申请号：US14916725

申请日：2014-09-04

Applicant: CKD CORPORATION ,  NIKON CORPORATION

Inventor： Akihiro ITO ,  Masayuki KOUKETSU ,  Shigeru MORIMOTO ,  Hiromitsu YOSHIMOTO ,  Koji TANAKA

IPC: H01F5/06 ,  H02K41/03 ,  H01F27/28 ,  H01F7/08 ,  H02K3/04

CPC classification number: H01F5/06 ,  G03F7/70758 ,  H01F5/00 ,  H01F7/08 ,  H01F27/2847 ,  H01F2027/2857 ,  H02K3/04 ,  H02K3/47 ,  H02K41/031

Abstract: Disclosed is an armature coil that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer that is provided between opposing surfaces of the electroconductive layer, and that electrically insulates the opposing electroconductive layers from one another; and bonding layer that bonds together the opposing surfaces of the electroconductive layer with the insulating layer therebetween.

Abstract translation: 公开了构成X轴线性电动机的定子并通过使电流通过其产生磁场的电枢线圈，电枢线圈包括：由铜制成的带状导电层， 预定绕线轴; 带状绝缘层，设置在导电层的相对表面之间，并使相对的导电层彼此电绝缘; 以及将导电层的相对表面与绝缘层粘合在一起的结合层。