发明申请
US20130280859A1 THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME 审中-公开
薄膜晶体管及其制造方法

  • 专利标题: THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME
  • 专利标题(中): 薄膜晶体管及其制造方法
  • 申请号: US13977725
    申请日: 2011-11-23
  • 公开(公告)号: US20130280859A1
    公开(公告)日: 2013-10-24
  • 发明人: Jae-Ho KimDong-Gun OhDo-Hyun ChoiJin-Wook Moon
  • 申请人: Jae-Ho KimDong-Gun OhDo-Hyun ChoiJin-Wook Moon
  • 优先权: KR10-2010-0139190 20101230; KR10-2011-0082199 20110818; KR10-2011-0122412 20111122
  • 国际申请: PCT/KR2011/008975 WO 20111123
  • 主分类号: H01L29/66
  • IPC分类号: H01L29/66
THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME
摘要:
Provided are a thin film transistor and a method of manufacturing the same. The thin film transistor includes: a gate electrode; source and drain electrodes spaced apart in a up and down direction from the gate electrode and in a horizontal direction from each other; a gate dielectric formed between the gate electrode and the source electrode and between the gate electrode and the drain electrode; and an active layer formed between the gate dielectric and the source electrode and between the gate dielectric and the drain electrode, wherein the active layer is formed of at least two zinc oxide thin layers doped with an element.
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