Invention Application
- Patent Title: METAL CUT PROCESS FLOW
- Patent Title (中): 金属切割工艺流程
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Application No.: US13451605Application Date: 2012-04-20
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Publication No.: US20130280909A1Publication Date: 2013-10-24
- Inventor: Yuan-Hsiang Lung , Kuei-Shun Chen , Meng-Wei Chen , Chia-Ying Lee
- Applicant: Yuan-Hsiang Lung , Kuei-Shun Chen , Meng-Wei Chen , Chia-Ying Lee
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L21/306
- IPC: H01L21/306 ; G03F1/70

Abstract:
A method for optimizing masks used for forming conductive features and a method for creating the mask features on an IC device are disclosed. An exemplary embodiment includes receiving a design database including a plurality of conductive features. First and second features suitable for joining are identified from the plurality of conductive features. A joined feature corresponding to the first and the second features is characterized. A cut shape configured to separate the first and second features from the joined feature is also characterized. The joined feature is categorized into a first conductive mask, the cut shape is categorized into a cut mask, and a third feature is categorized into a second conductive mask. The categorized shapes and features of the first conductive mask, the second conductive mask, and the cut mask are provided for manufacturing a mask set corresponding to the categorized shapes and features.
Public/Granted literature
- US08850369B2 Metal cut process flow Public/Granted day:2014-09-30
Information query
IPC分类: