发明申请
- 专利标题: ORGANIC THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 有机薄膜晶体管及其制造方法
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申请号: US13670001申请日: 2012-11-06
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公开(公告)号: US20130292650A1公开(公告)日: 2013-11-07
- 发明人: Ji-Young JUNG , Joo-Young KIM , Hyeok KIM
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-Si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-Si
- 优先权: KR10-2012-0047548 20120504
- 主分类号: H01L51/10
- IPC分类号: H01L51/10 ; H01L51/40
摘要:
According to example embodiments, a method of manufacturing an organic thin film transistor includes sequentially forming a gate electrode, a gate insulator, a source electrode, and a drain electrode on a substrate, forming a first self-assembled monolayer on the source electrode and the drain electrode from a first self-assembled monolayer precursor, forming a second self-assembled monolayer on the gate insulator from a second self-assembled monolayer precursor that is different from the first self-assembled monolayer precursor, and forming an organic semiconductor on the first self-assembled monolayer and the second self-assembled monolayer. The first self-assembled monolayer and the second self-assembled monolayer may be formed simultaneously or sequentially in a single container. An organic thin film transistor may be manufactured according to the method. A display device may include the organic thin film transistor.
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