发明申请
- 专利标题: DIGITAL CONTROL FOR A MICROELECTROMECHANICAL ELEMENT
- 专利标题(中): 微电子元件数字控制
-
申请号: US13988457申请日: 2011-10-13
-
公开(公告)号: US20130293161A1公开(公告)日: 2013-11-07
- 发明人: Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
- 申请人: Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
- 优先权: DE102010061790.3 20101123
- 国际申请: PCT/EP2011/067854 WO 20111013
- 主分类号: H02P13/00
- IPC分类号: H02P13/00
摘要:
A control circuit for a microelectromechanical element includes: a waveform generator, which is designed to generate a digital trigger signal for the microelectromechanical element, a modulator, which is designed to oversample the digital trigger signal, to subject the signal to a noise shaping, and to output the oversampled and noise-shaped digital trigger signal; and a digital driver device, which is designed to drive the microelectromechanical element using the oversampled and noise-shaped digital trigger signal.
公开/授权文献
- US09722521B2 Digital control for a microelectromechanical element 公开/授权日:2017-08-01