Micro-mirror system and associated control method
    1.
    发明授权
    Micro-mirror system and associated control method 有权
    微镜系统及相关控制方法

    公开(公告)号:US08810892B2

    公开(公告)日:2014-08-19

    申请号:US13431202

    申请日:2012-03-27

    IPC分类号: G02B26/00 G02B26/02 G02F1/00

    摘要: A micro-mirror system having a micro-mirror actuator, a sensor for detecting the position of the micro-mirror actuator, a light module having at least one light source and an associated control system via which a light intensity of the light source is controllable, and an evaluation and control unit which is designed to control the micro-mirror actuator as a function of an output signal of the sensor. The system provides that the evaluation and control unit includes a compensation routine in which an offset voltage of the output signal of the sensor is settable as a function of the light intensity of the light source to be expected at the point in time that the micro-mirror actuator is activated.

    摘要翻译: 具有微反射镜致动器,用于检测微反射镜致动器的位置的传感器的微镜系统,具有至少一个光源的光模块和相关联的控制系统,光源的光强度可通过该控制系统控制 以及评估和控制单元,其被设计成根据传感器的输出信号来控制微镜致动器。 该系统提供评估和控制单元包括补偿程序,其中传感器的输出信号的偏移电压可设置为在微时刻的时间点期望的光源的光强度的函数, 反光镜驱动器被激活。

    DIGITAL CONTROL FOR A MICROELECTROMECHANICAL ELEMENT
    3.
    发明申请
    DIGITAL CONTROL FOR A MICROELECTROMECHANICAL ELEMENT 有权
    微电子元件数字控制

    公开(公告)号:US20130293161A1

    公开(公告)日:2013-11-07

    申请号:US13988457

    申请日:2011-10-13

    IPC分类号: H02P13/00

    摘要: A control circuit for a microelectromechanical element includes: a waveform generator, which is designed to generate a digital trigger signal for the microelectromechanical element, a modulator, which is designed to oversample the digital trigger signal, to subject the signal to a noise shaping, and to output the oversampled and noise-shaped digital trigger signal; and a digital driver device, which is designed to drive the microelectromechanical element using the oversampled and noise-shaped digital trigger signal.

    摘要翻译: 用于微机电元件的控制电路包括:波形发生器,其被设计为产生用于微机电元件的数字触发信号;调制器,被设计为过采样数字触发信号,以对信号进行噪声整形;以及 输出过采样和噪声形状的数字触发信号; 以及数字驱动器装置,其被设计成使用过采样和噪声形状的数字触发信号驱动微机电元件。

    Micro-Mirror System And Associated Control Method
    4.
    发明申请
    Micro-Mirror System And Associated Control Method 有权
    微镜系统及相关控制方法

    公开(公告)号:US20120262775A1

    公开(公告)日:2012-10-18

    申请号:US13431202

    申请日:2012-03-27

    IPC分类号: G02B26/00

    摘要: A micro-mirror system having a micro-mirror actuator, a sensor for detecting the position of the micro-mirror actuator, a light module having at least one light source and an associated control system via which a light intensity of the light source is controllable, and an evaluation and control unit which is designed to control the micro-mirror actuator as a function of an output signal of the sensor. The system provides that the evaluation and control unit includes a compensation routine in which an offset voltage of the output signal of the sensor is settable as a function of the light intensity of the light source to be expected at the point in time that the micro-mirror actuator is activated.

    摘要翻译: 具有微反射镜致动器,用于检测微反射镜致动器的位置的传感器的微镜系统,具有至少一个光源的光模块和相关联的控制系统,光源的光强度可通过该控制系统控制 以及评估和控制单元,其被设计成根据传感器的输出信号来控制微镜致动器。 该系统提供评估和控制单元包括补偿程序,其中传感器的输出信号的偏移电压可设置为在微时刻的时间点期望的光源的光强度的函数, 反光镜驱动器被激活。

    Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator
    5.
    发明授权
    Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator 有权
    用于致动微机械致动器的控制器,用于致动微机械致动器的致动系统,微镜系统和用于致动微机械致动器的方法

    公开(公告)号:US09310606B2

    公开(公告)日:2016-04-12

    申请号:US14471765

    申请日:2014-08-28

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0841

    摘要: A controller for actuating a micromechanical actuator, including a first signal input which is designed to receive a reference signal, a second signal input which is designed to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, a first controller element which is designed to filter and/or to attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered and/or attenuated reference signal, a second controller element which is designed to modify the received measuring signal in order to minimize the quality of the first mode of the received measuring signal and to output a modified measuring signal, a third controller element which is designed to minimize the deviation between the filtered and/or attenuated reference signal and the received measuring signal and to output a minimized reference signal, a fourth controller element which is designed to modify the bandwidth of the received measuring signal and to subtract it from the minimized reference signal, which makes up the control signal. Furthermore, a corresponding actuating system, a corresponding micro-mirror system and a corresponding method are described.

    摘要翻译: 一种用于致动微机械致动器的控制器,包括被设计为接收参考信号的第一信号输入,被设计为接收表示由微机械致动器对控制信号的记录响应的测量信号的第二信号输入端,第一 控制器元件,其被设计为过滤和/或衰减所接收的参考信号中的预定频率模式和/或预定义的频率分量,并输出滤波和/或衰减的参考信号;第二控制器元件,被设计为修改所接收的测量 信号,以便最小化所接收的测量信号的第一模式的质量并输出修改的测量信号;第三控制器元件,其被设计为最小化滤波和/或衰减的参考信号与接收的测量信号之间的偏差;以及 以输出最小化的参考信号,被设计为修改的第四控制器元件 接收到的测量信号的带宽,并将其从构成控制信号的最小化参考信号中减去。 此外,描述了相应的致动系统,相应的微镜系统和相应的方法。

    Method for adapting the parameters of a controller for micromechanical actuators, and device
    6.
    发明授权
    Method for adapting the parameters of a controller for micromechanical actuators, and device 有权
    用于适应微机械致动器的控制器的参数的方法和装置

    公开(公告)号:US09354441B2

    公开(公告)日:2016-05-31

    申请号:US14471896

    申请日:2014-08-28

    IPC分类号: G02B26/08 B81B3/00 B81C99/00

    摘要: A method for adapting the parameters of a controller for micromechanical actuators, including the following steps: applying on the micromechanical actuator a test signal which has a step, detecting a test signal response of the micromechanical actuator to the test signal, identifying an absolute position of at least one mode in the detected test signal response, and adapting at least one of the parameters of the controller based on the identified absolute position of the at least one mode. Moreover, a corresponding device is described.

    摘要翻译: 一种用于适应微机械致动器的控制器的参数的方法,包括以下步骤:在微机械致动器上施加具有步骤的测试信号,检测微机械致动器对测试信号的测试信号响应,识别绝对位置 在检测到的测试信号响应中的至少一个模式,以及基于所识别的至少一个模式的绝对位置来调整控制器的至少一个参数。 此外,描述了相应的装置。