发明申请
US20130295751A1 THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD
审中-公开
用于太阳能电池和薄膜形成方法的薄膜形成装置
- 专利标题： THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD
- 专利标题（中）： 用于太阳能电池和薄膜形成方法的薄膜形成装置
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申请号： US13978942申请日： 2012-01-13
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公开(公告)号： US20130295751A1公开(公告)日： 2013-11-07
- 发明人: Takamasa Kato , Masaki Narushima , Kenichi Hara
- 申请人： Takamasa Kato , Masaki Narushima , Kenichi Hara
- 申请人地址： JP Tokyo JP Yamanashi
- 专利权人： TOKYO ELECTRON LIMITED,UNIVERSITY OF YAMANASHI
- 当前专利权人： TOKYO ELECTRON LIMITED,UNIVERSITY OF YAMANASHI
- 当前专利权人地址： JP Tokyo JP Yamanashi
- 优先权： JP2011-005310 20110113; JP2011-278995 20111220
- 国际申请： PCT/JP2012/050572 WO 20120113
- 主分类号： H01L21/02
- IPC分类号： H01L21/02
摘要：
This thin film forming method for a solar cell forms a thin film that contains a plurality of elements on the surface of an object to be processed. A raw material solution that contains the elements is dispersed in a processing space and microparticles by an electric field, and the microparticles that are dispersed form a thin film that adheres to the surface of the object to be processed. Thus, a thin film for a solar cell element with preferable crystallinity can be formed even in an atmosphere at atmospheric pressure.
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